Dr. Brown frequently works on patent applications pertaining to semiconductor manufacturing technology. These patent applications most often involve chemical mechanical polishing, etching, PE-CVD, HDP-CVD, SACVD, PVD, EPI, RTP, ALD, PSI, photolithography, photoresist processing, optical metrology including critical dimension and overlay measurements, defect inspection, substrate cleaning and rotary run-out metrology.
Dr. Brown has more than 10 years of experience developing semiconductor and magnetic-media manufacturing equipment. Prior to joining the firm, he worked as a process engineer, systems engineer and research scientist.
Cornell University, Ph.D., Physics (1995)
Cornell University, M.S., Physics (1991)
Case Western Reserve University, B.S., Physics (1987)
U.S. Patent and Trademark Office (2006)
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